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Search for "electron-induced chemistry, FEBID" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.

Chemistry for electron-induced nanofabrication

  • Petra Swiderek,
  • Hubertus Marbach and
  • Cornelis W. Hagen

Beilstein J. Nanotechnol. 2018, 9, 1317–1320, doi:10.3762/bjnano.9.124

Graphical Abstract
  • -Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany, Department of Imaging Physics, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands 10.3762/bjnano.9.124 Keywords: electron-induced chemistry, FEBID; FEBIP; nanofabrication; nanolithography; Electron
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Editorial
Published 30 Apr 2018
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