Beilstein J. Nanotechnol.2018,9, 1317–1320, doi:10.3762/bjnano.9.124
-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany, Department of Imaging Physics, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands 10.3762/bjnano.9.124 Keywords: electron-inducedchemistry, FEBID; FEBIP; nanofabrication; nanolithography; Electron